During 1986, a physical vapor deposition titanium nitride reactive ion plating unit, the first of its kind shipped to the U.S., was put in to operation. It was designed for electron beam evaporation of titanium, utilizing triode plasma configuration and hot filament ionization assist. This article outlines some start-up and learning problems, and describes present equipment, Vacuum Furnace Systems Corp. modifications, and helpful processing tips.
Both theoretical calculations and experience indicate that high-velocity gas flow resulting in gas turbulence within the furnace hot zone is the principal factor for rapid quenching. Therefore, a high-volume recirculating gas atmosphere is essential for providing high-cfm flow through the work zone while conserving gas.